FBK-CMM WHERE INNOVATION IS LED BY R&D FBK-Center for Materials and Microsystems is an applied Research Centre that combines scientific excellence with the ability to exploit research outcomes and results within national and international networks, aiming at optimizing the expertise through open innovation. FBK-CMM develops innovative solutions in the fields of materials, microsystems, renewable energy and environment. FBK-CMM accounts for 140 Researchers and Technicians and operates large scales facilities for research and product industrialization including a Microfabrication Area (ISO 4-5, ISO 9001), as well as the chemical-physical and analytical laboratory for micro & nano material characterization (ISO/IEC 17025:2005). F FBK-CMM has more than two decades of successful experience in collaboration with business companies in the EU and abroad, a portfolio of 18 patents has been generated during past years. FBK-CMM’s long lasting experience of collaboration with Industry is supported by employees and management having had direct experience in the hightech industry. • • • More than 40 development and service contracts with private companies and 13 projects with international organizations for an overall annual revenue of 5,1 MEuro contribute to Centre’s budget. • 10 Companies have been spun off as the result of the valorization of CMM’s research activity. • Competences of CMM and Application Areas Research activities mainly focus on materials, microsystems, renewable energy and environment and relate to three main application fields: • • • Materials & Interfaces Theoretical models and computational techniques; Development of new materials and interfaces; Chemical-physical analysis of materials and interfaces. Devices & Microsystems Design, fabrication, characterization and packaging of innovative devices based on silicon compatible technology. In particular: Silicon-based devices for radiation detection. CMOS high-performance low-cost vision devices; Silicon-based photonics and custom MEMS for radio frequency, biomedical, agro-food and environmental applications. Integrated systems Study and development of innovative solutions for renewable energies with a special focus on energy re-use and zeroenergy buildings; 3D metrology applications based on terrestrial, UAV, aerial and satellite photogrammetry. Main Facilities Research areas are supported through leading edge laboratories and facilities, covering an area of about 2000 sqm. In particular, the facilities supporting the commercialization of innovative products are certified according the international standards such as the ISO 4 -5, ISO 9001 certified Clean Room and the ISO/IEC 17025:2005 accreditation and quality management Chemical/Physical laboratory. Main technological asset of CMM 6 inch Wafer Microfabrication Area Example of spin off companies AdvanSiD http://www.advansid.com/ • • • Fabrication and testing of silicon device 700 sqm Clean Room: (ISO 4-5, ISO 9001) full CMOS pilot line, DRIE, wafer bonder, electroplating, bulk micromachining; 200 sqm Testing Area: manual–automatic electrical testing, optical testing, PV cells efficiency; 60 sqm Integration Area: microassembly, screen printing, ball & wedge bonding, pull & shear test, CNC micromill. Chemical-physical and analytical laboratory for micro & nano material characterization • • • • • • • • • • Chemical-physical characterization of materials and interfaces SIMS Dynamic Secondary Ion Mass Spectrometry ToF-SIMS Time of Flight Secondary Ion Mass Spectrometry XPS X-Ray Photoelectron Spectroscopy SEM / EDX Scanning Electron Microscopy / Energy Dispersive X-ray spectroscopy EBSD Electron Back Scattering Diffraction AFM Atomic Force Microscopy AES Auger Electron Spectroscopy XRD X-ray diffraction Italstructures PTR-MS Proton Transfer Mass Spectrometry; XRD/XRF X-Ray diffraction / fluorescence / reflectometry. In order to support partners and customers from research through volume production along the entire product value-chain of a silicon device, the CMM has also developed strategic relationships with external commercial foundries. A semiconductors company silicon radiation sensors. offering RF Microtech, http://www.rfmicrotech.com/ Solutions for industries and system integrators, expertise in the area of microwave circuits and antennas. Optoi http://www.optoi.com Silicon sensors and Microsystems, smart electronic systems as well as MEMS devices. Smart3k http://www.smart3k.it/ Services and documentation, preservation, restoration and production of replicas 3D modeling applied in different fields. Fabrica Ludens, http://www.fabricaludens.it/ Development and commercialization of smART-SYSTEM (Synchronized Multimedia-Art-System). TNX http://www.tnx-rx.com/ X-ray technologies. Z2M http://www.z2m.it/ A system to fight counterfeiting and protect identity. Examples of industrial research contracts with business companies GET INSPIRED Visit http://cmm.fbk.eu and get access to the one-of-a-kind world of R&D Contacts Dr. Massimo Gentili, FBK-CMM Director M. gentili@fbk.eu W. http://cmm.fbk.eu/
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