A PASSION FOR PERFECTION Gas dosing valve with separate shut-off valve, manual, DN 16 ISO-KF Chambers & Components / Valves EVN 116, Gas dosing valve with separate shut-off valve, manual Closable without changing the gas flow setting Optimum characteristic Digital position display Excellent reproducibility Extremely small dead volume Very broad regulating range Dimensions www.pfeiffer-vacuum.com Page 2 Chambers & Components / Valves Technical Data EVN 116, Gas dosing valve with separate shut-off valve, manual Bakeout temperature: flanges Dead volume Differential pressure Dosing sleeve Flange (in) Flange (out) Gas flow max. controllable Gas flow min. controllable 150 °C | 302 °F | 423 K 0.032 cm3 2,500 hPa | 1,875 Torr | 2,500 mbar Fluorplastomer DN 16 ISO-KF DN 16 ISO-KF 1,000 hPa l/s | 750 Torr l/s | 1,000 mbar l/s 5 · 10-6 hPa l/s | 3.75 · 10-6 Torr l/s | 5 · 10-6 mbar l/s Stainless steel FKM 80 °C | 176 °F | 353 K 1 · 10-10 Pa m3/s | 7.5 · 10-10 Torr l/s | 1 · 10-9 mbar l/s Gas dosing valve 0.4 kg | 0.88 lb Housing/needle/filter Seal Temperature: Operating Tightness Type Weight Order number Gas dosing valve with separate shut-off valve, manual, DN 16 ISO-KF www.pfeiffer-vacuum.com PF I32 031 Page 3 Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 info@pfeiffer-vacuum.de www.pfeiffer-vacuum.com All data subject to change without prior notice. (10/14/2014) Vacuum solutions from a single source