Capacitance Gauges CMR 375 (1 · 10-5 - 0.11 hPa), temperature controlled The capacitance diaphragm gauges CMR afford highly accurate vacuum measurements. The sensor is designed in ceramic technology, thus assuring only marginal zero drift and outstanding long-term and temperature stability. Measurement & Analysis / Measurement / ActiveLine CMR 375, 0.1 hPa F.S., pipe OD 1/2" Measurement range from 1 · 10-5 to 0.11 hPa Capacitive diaphragm gauge for ActiveLine Sensor in ceramic technology No memory effects Materials employed have identical temperature coefficients Excellent temperature compensation Resistant to corrosive gases Excellent zero stability Similar Image Additional protection against pollution by sensor shield Dimensions www.pfeiffer-vacuum.com Page 2 Measurement & Analysis / Measurement / ActiveLine Technical Data CMR 375, 0.1 hPa F.S., pipe OD 1/2" Accuracy: % of measurement Bakeout temperature max. at the flange Flange (in) Full scale Measurement range max. Measurement range min. Membrane and measuring chamber Output signal: Minimum load Output signal: Pressure range Output signal: Sensor error above Output signal: Sensor error below Pipe and flange Pressure max. Protection category Resolution Response time Supply: Power consumption max. Supply: Voltage Temperature: Operating Temperature: Storage Temperature effect: on span Temperature effect: on zero Temperature stabilization Volume Weight 0.15 110 °C | 230 °F | 383 K Tube OD 1/2" 0.1 hPa | 0.08 Torr | 0.1 mbar 0.11 hPa | 0.08 Torr | 0.11 mbar 1 · 10-5 hPa | 7.5 · 10-6 Torr | 1 · 10-5 mbar Ceramics (Al2O3 <= 99.5 %) > 10 k 1 - 9.8 V > 9.8 V < 0.4 V Stainless steel 1,300 hPa | 975 Torr | 1,300 mbar IP 40 0.003 % F.S. 130 ms 12 W 14-30 V DC 10-40 °C | 50-104 °F | 283-313 K -40-65 °C | -40-149 °F | 233-338 K 0.01 % of reading/°C 0.005 % F.S./°C 45 °C | 113 °F | 318 K 4.2 cm3 900 g Order number Capacitance Gauges CMR 375 (1 · 10-5 - 0.11 hPa), temperature controlled PT R25 140 Accessories ActiveLine sensor cables Sensor cable, 3 m www.pfeiffer-vacuum.com PT 448 250 -T Page 3 Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 info@pfeiffer-vacuum.de www.pfeiffer-vacuum.com All data subject to change without prior notice. (01/21/2015) Vacuum solutions from a single source